JPH0312437U - - Google Patents
Info
- Publication number
- JPH0312437U JPH0312437U JP7394489U JP7394489U JPH0312437U JP H0312437 U JPH0312437 U JP H0312437U JP 7394489 U JP7394489 U JP 7394489U JP 7394489 U JP7394489 U JP 7394489U JP H0312437 U JPH0312437 U JP H0312437U
- Authority
- JP
- Japan
- Prior art keywords
- guard
- stage structure
- wafer
- shield
- suction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Jigs For Machine Tools (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7394489U JPH0312437U (en]) | 1989-06-22 | 1989-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7394489U JPH0312437U (en]) | 1989-06-22 | 1989-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0312437U true JPH0312437U (en]) | 1991-02-07 |
Family
ID=31613201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7394489U Pending JPH0312437U (en]) | 1989-06-22 | 1989-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312437U (en]) |
-
1989
- 1989-06-22 JP JP7394489U patent/JPH0312437U/ja active Pending